Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging system

Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging system

US Patent 6977717 · Granted Dec 20, 2005

Estimated economic value: $11,866,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Hyperspectral sensing system and processing methods for hyperspectral data2024
Hyperspectral sensing system and methods2023
Hyperspectral sensing system2022
Hyperspectral sensing system2022
Hyperspectral sensing system and processing methods for hyperspectral data2021
Hyperspectral sensing system2020
Methods, apparatus and system for a passthrough-based architecture2020
Methods of patterning variable width metallization lines2019
Integrated circuit structure including power rail and tapping wire with method o2019
Structure with local contact for shorting a gate electrode to a source/drain reg2019
Method, apparatus, and system for two-dimensional power rail to enable scaling o2018
Transistor contacts self-aligned in two dimensions2018