| 8872123 |
Method of timing laser beam pulses to regulate extreme ultraviolet light dosing |
James H. Crouch, Matthew R. Graham, Andrew Liu |
2014-10-28 |
$7,369,000 |
| 8102889 |
Multi-chamber gas discharge laser bandwidth control through discharge timing |
William N. Partlo, Daniel J. W. Brown |
2012-01-24 |
$11,665,000 |
| 8098698 |
Active spectral control of DUV laser light source |
Wayne J. Dunstan |
2012-01-17 |
$11,652,000 |
| RE42588 |
Control system for a two chamber gas discharge laser system |
John P. Fallon, Richard L. Sandstrom, William N. Partlo, Alexander I. Ershov, Toshihiko Ishihara +4 more |
2011-08-02 |
|
| 7852889 |
Active spectral control of DUV light source |
Wayne J. Dunstan, Rajasekhar Rao, Fedor Trintchouk |
2010-12-14 |
$2,696,000 |
| 7835414 |
Laser gas injection system |
Wayne J. Dunstan, Kevin M. O'Brien, Herve A. Besaucele, Aravind Ratnam |
2010-11-16 |
$6,569,000 |
| 7830942 |
Ultraviolet laser light source pulse energy control system |
Wayne J. Dunstan |
2010-11-09 |
$3,358,000 |
| 7830934 |
Multi-chamber gas discharge laser bandwidth control through discharge timing |
William N. Partlo, Daniel J. W. Brown |
2010-11-09 |
$3,358,000 |
| 7822084 |
Method and apparatus for stabilizing and tuning the bandwidth of laser light |
Kevin M. O'Brien |
2010-10-26 |
$2,243,000 |
| 7756171 |
Method and apparatus for laser control in a two chamber gas discharge laser |
— |
2010-07-13 |
$5,609,000 |
| 7751453 |
Method and apparatus for laser control in a two chamber gas discharge laser |
— |
2010-07-06 |
$5,025,000 |
| 7741639 |
Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control |
Herve A. Besaucele, Wayne J. Dunstan, Toshihiko Ishihara, Fedor Trintchouk |
2010-06-22 |
$2,985,000 |
| 7720120 |
Method and apparatus for laser control in a two chamber gas discharge laser |
— |
2010-05-18 |
$5,832,000 |
| 7643528 |
Immersion lithography laser light source with pulse stretcher |
William N. Partlo, Alexander I. Ershov, German E. Rylov, Igor V. Fomenkov, Daniel J. W. Brown +11 more |
2010-01-05 |
$1,571,000 |
| 7643522 |
Method and apparatus for gas discharge laser bandwidth and center wavelength control |
Fedor Trintchouk |
2010-01-05 |
$1,571,000 |
| 7596164 |
Control system for a two chamber gas discharge laser |
John P. Fallon, John Allen Rule, Jacob Lipcon, William N. Partlo, Alexander I. Ershov +4 more |
2009-09-29 |
$9,934,000 |
| 7382815 |
Laser spectral engineering for lithographic process |
Ronald Spangler, Jacob Lipcon, John Allen Rule, Armen Kroyan, Ivan Lalovic +2 more |
2008-06-03 |
$9,230,000 |
| 7298770 |
Laser spectral engineering for lithographic process |
Ronald Spangler, Jacob Lipcon, John Allen Rule, Armen Kroyan, Ivan Lalovic +2 more |
2007-11-20 |
$9,079,000 |
| 7164144 |
EUV light source |
William N. Partlo, Norbert Bowering, Alexander I. Ershov, Igor V. Fomenkov, David W. Myers +2 more |
2007-01-16 |
$14,761,000 |
| 7158840 |
Tuning control parameters of vibration reduction and motion control systems for fabrication equipment and robotic systems |
— |
2007-01-02 |
|
| 7116695 |
Laser output light pulse beam parameter transient correction system |
— |
2006-10-03 |
$16,648,000 |
| 7087914 |
High repetition rate laser produced plasma EUV light source |
Robert P. Akins, Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, John M. Algots +2 more |
2006-08-08 |
$7,262,000 |
| 7079564 |
Control system for a two chamber gas discharge laser |
John P. Fallon, John Allen Rule, Jacob Lipcon, William N. Partlo, Alexander I. Ershov +4 more |
2006-07-18 |
$7,512,000 |
| 7039086 |
Control system for a two chamber gas discharge laser |
John P. Fallon, John Allen Rule, Jacob Lipcon, Richard L. Sandstrom, William N. Partlo +5 more |
2006-05-02 |
$19,643,000 |
| 6959484 |
System for vibration control |
Ronald Spangler, Emanuele Bianchini, Baruch Pletner, Betsy Marsh |
2005-11-01 |
$12,403,000 |
