Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8982922 | Very high power laser chamber optical improvements | Hong Ye, Alex Ershov, Daniel J. W. Brown, Slava Rokitski, Rong (Lauren) Liu +5 more | 2015-03-17 |
| 8284815 | Very high power laser chamber optical improvements | Hong Ye, Alex Ershov, Daniel J. W. Brown, Slava Rokitski, Rong (Lauren) Liu +5 more | 2012-10-09 |
| 7852889 | Active spectral control of DUV light source | Wayne J. Dunstan, Robert N. Jacques, Fedor Trintchouk | 2010-12-14 |
| 7643528 | Immersion lithography laser light source with pulse stretcher | William N. Partlo, Alexander I. Ershov, German E. Rylov, Igor V. Fomenkov, Daniel J. W. Brown +11 more | 2010-01-05 |
| 7292343 | Gas discharge MOPA laser spectral analysis module | John T. Melchior, Holger Glatzel | 2007-11-06 |
| 7006547 | Very high repetition rate narrow band gas discharge laser system | Thomas D. Steiger, Edward P. Holtaway, Bryan Moosman | 2006-02-28 |
| 6912052 | Gas discharge MOPA laser spectral analysis module | John T. Melchior, Holger Glatzel | 2005-06-28 |
| 6894785 | Gas discharge MOPA laser spectral analysis module | John T. Melchior, Holger Glatzel | 2005-05-17 |
| 6873418 | Optical mountings for gas discharge MOPA laser spectral analysis module | James K. Howey | 2005-03-29 |
| 6750972 | Gas discharge ultraviolet wavemeter with enhanced illumination | Richard L. Sandstrom, John T. Melchior | 2004-06-15 |
| 6535531 | Gas discharge laser with pulse multiplier | Scott T. Smith, Alexander I. Ershov | 2003-03-18 |