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Systems and methods for multicolor imaging |
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Eli N. Glezer |
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Method and apparatus for controlling light bandwidth |
Kevin M. O'Brien |
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Active spectral control of DUV light source |
Wayne J. Dunstan, Robert N. Jacques, Rajasekhar Rao |
2010-12-14 |
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Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control |
Herve A. Besaucele, Wayne J. Dunstan, Toshihiko Ishihara, Robert N. Jacques |
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Method and apparatus for gas discharge laser bandwidth and center wavelength control |
Robert N. Jacques |
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Gas discharge laser chamber improvements |
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Gas discharge laser output light beam parameter control |
Herve A. Besaucele, Igor V. Fomenkov, William N. Partlo, Hao Ton That |
2008-12-30 |
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Automatic gas control system for a gas discharge laser |
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2005-11-08 |