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Adaptive laser system for an extreme ultraviolet light source |
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2016-06-28 |
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Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser |
Thomas D. Steiger, Richard C. Ujazdowski |
2014-08-26 |
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Metal fluoride trap |
Richard G. Morton |
2010-10-26 |
| 7706424 |
Gas discharge laser system electrodes and power supply for delivering electrical energy to same |
James A. Carmichael, Richard G. Morton, Richard M. Ness |
2010-04-27 |
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Gas discharge laser chamber improvements |
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2009-04-21 |
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Adjustable flow guide to accommodate electrode erosion in a gas discharge laser |
Richard G. Morton, Bryan Moosman |
2006-06-27 |
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Gas laser |
Hiroshi Komori, Osamu Wakabayashi |
2000-11-21 |
| 6008497 |
Laser appartus |
Hakaru Mizoguchi, Osamu Wakabayashi, Yukio Kobayashi, Tatsuo Mimura |
1999-12-28 |
| 5710787 |
Output controller for laser device |
Osamu Wakabayashi, Noritoshi Ito |
1998-01-20 |
| 5557629 |
Laser device having an electrode with auxiliary conductor members |
Hakaru Mizoguchi, Noritoshi Ito |
1996-09-17 |
| 5535233 |
Laser device |
Hakaru Mizoguchi, Noritoshi Ito |
1996-07-09 |
| 5463650 |
Apparatus for controlling output of an excimer laser device |
Noritoshi Ito, Osamu Wakabayashi |
1995-10-31 |
| 5373523 |
Excimer laser apparatus |
Junichi Fujimoto, Hakaru Mizoguchi, Osamu Wakabayashi |
1994-12-13 |
| 5291509 |
Gas laser apparatus |
Hakaru Mizoguchi, Junichi Fujimoto |
1994-03-01 |
| 4975919 |
Laser wavelength control apparatus |
Osamu Wakabayashi, Masahiko Kowaka |
1990-12-04 |