Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE38372 | Narrow band excimer laser and wavelength detecting apparatus | Osamu Wakabayashi, Yukio Kobayashi | 2003-12-30 |
| 6510888 | Substrate support and method of fabricating the same | Naomi Matsumura, William Bagley, Akira Terashi, Hideaki Kondo | 2003-01-28 |
| 5802094 | Narrow band excimer laser | Osamu Wakabayashi, Yukio Kobayashi | 1998-09-01 |
| 5716133 | Shielded heat sensor for measuring temperature | Akihiro Hosokawa | 1998-02-10 |
| 5596596 | Narrow band excimer laser | Osamu Wakabayashi, Yukio Kobayashi | 1997-01-21 |
| 5450436 | Laser gas replenishing apparatus and method in excimer laser system | Hakaru Mizoguchi, Junichi Fujimoto, Tomokazu Takahashi | 1995-09-12 |
| 5404366 | Narrow band excimer laser and wavelength detecting apparatus | Osamu Wakabayashi, Yukio Kobayashi | 1995-04-04 |
| 5373515 | Laser wavelength controlling apparatus | Osamu Wakabayashi, Yasuo Itakura, Yoshino Amada | 1994-12-13 |
| 5218421 | Wavelength detecting apparatus | Osamu Wakabayashi, Yukio Kobayashi | 1993-06-08 |
| 5198872 | Apparatus for detecting the wavelength of laser light | Osamu Wakabayashi, Yukio Kobayashi | 1993-03-30 |
| 5142543 | Method and system for controlling narrow-band oscillation excimer laser | Osamu Wakabayashi | 1992-08-25 |
| 5081635 | Apparatus for controlling output from an excimer laser device | Osamu Wakabayashi, Noritoshi Ito | 1992-01-14 |
| 4975919 | Laser wavelength control apparatus | Yoshiho Amada, Osamu Wakabayashi | 1990-12-04 |
| 4926428 | Method and apparatus for sensing the wavelength of a laser beam | Koichi Kajiyama, Kaoru Saito, Yasuo Itakura, Osamu Wakabayashi, Tadayoshi Yamaguchi | 1990-05-15 |
| 4856018 | Light source for reduced projection | Yasuhiro Nozue, Koichi Kajiyama, Kaoru Saito, Osamu Wakabayashi, Yasuo Itakura | 1989-08-08 |
| 4829536 | Multi-mode narrow-band oscillation excimer laser | Koichi Kajiyama, Kaoru Saito, Yasuhiro Nozue, Noritoshi Ito, Osamu Wakabayashi +2 more | 1989-05-09 |