| RE38372 |
Narrow band excimer laser and wavelength detecting apparatus |
Osamu Wakabayashi, Yukio Kobayashi |
2003-12-30 |
| 6510888 |
Substrate support and method of fabricating the same |
Naomi Matsumura, William Bagley, Akira Terashi, Hideaki Kondo |
2003-01-28 |
| 5802094 |
Narrow band excimer laser |
Osamu Wakabayashi, Yukio Kobayashi |
1998-09-01 |
| 5716133 |
Shielded heat sensor for measuring temperature |
Akihiro Hosokawa |
1998-02-10 |
| 5596596 |
Narrow band excimer laser |
Osamu Wakabayashi, Yukio Kobayashi |
1997-01-21 |
| 5450436 |
Laser gas replenishing apparatus and method in excimer laser system |
Hakaru Mizoguchi, Junichi Fujimoto, Tomokazu Takahashi |
1995-09-12 |
| 5404366 |
Narrow band excimer laser and wavelength detecting apparatus |
Osamu Wakabayashi, Yukio Kobayashi |
1995-04-04 |
| 5373515 |
Laser wavelength controlling apparatus |
Osamu Wakabayashi, Yasuo Itakura, Yoshino Amada |
1994-12-13 |
| 5218421 |
Wavelength detecting apparatus |
Osamu Wakabayashi, Yukio Kobayashi |
1993-06-08 |
| 5198872 |
Apparatus for detecting the wavelength of laser light |
Osamu Wakabayashi, Yukio Kobayashi |
1993-03-30 |
| 5142543 |
Method and system for controlling narrow-band oscillation excimer laser |
Osamu Wakabayashi |
1992-08-25 |
| 5081635 |
Apparatus for controlling output from an excimer laser device |
Osamu Wakabayashi, Noritoshi Ito |
1992-01-14 |
| 4975919 |
Laser wavelength control apparatus |
Yoshiho Amada, Osamu Wakabayashi |
1990-12-04 |
| 4926428 |
Method and apparatus for sensing the wavelength of a laser beam |
Koichi Kajiyama, Kaoru Saito, Yasuo Itakura, Osamu Wakabayashi, Tadayoshi Yamaguchi |
1990-05-15 |
| 4856018 |
Light source for reduced projection |
Yasuhiro Nozue, Koichi Kajiyama, Kaoru Saito, Osamu Wakabayashi, Yasuo Itakura |
1989-08-08 |
| 4829536 |
Multi-mode narrow-band oscillation excimer laser |
Koichi Kajiyama, Kaoru Saito, Yasuhiro Nozue, Noritoshi Ito, Osamu Wakabayashi +2 more |
1989-05-09 |
