Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347995 | Chamber device, gas laser device, and electronic device manufacturing method | Rei TAKENAKA, Masanori TERAMOTO, Jeffrey P. Sercel | 2025-07-01 |
| 12327975 | Chamber device, and electronic device manufacturing method | Takahiro Tatsumi, Kazuki Nagai, Jeffrey P. Sercel | 2025-06-10 |
| 11050210 | Capacitor cooling structure and laser apparatus | Hisakazu KATSUUMI, Satoshi Tanaka | 2021-06-29 |
| 10495890 | Laser system or laser exposure system | Osamu Wakabayashi, Kouji Kakizaki | 2019-12-03 |
| 9748727 | Preliminary ionization discharge device and laser apparatus | Kouji Kakizaki, Hiroaki TSUSHIMA, Natsushi Suzuki, Hisakazu KATSUUMI | 2017-08-29 |
| 9507248 | Two-beam interference apparatus and two-beam interference exposure system | Shinji Okazaki, Hakaru Mizoguchi, Takashi Matsunaga, Kouji Kakizaki, Osamu Wakabayashi | 2016-11-29 |
| 9373926 | Laser chamber and discharge excitation gas laser apparatus | Hiroaki TSUSHIMA, Hakaru Mizoguchi, Hiroaki Nakarai, Natsushi Suzuki | 2016-06-21 |
| 9225139 | Discharge-pumped gas laser device | Akihiko KUROSU, Yosuke Ishizuka, Takashi Matsunaga, Osamu Wakabayashi | 2015-12-29 |
| 9147993 | Master oscillator system and laser apparatus | Takahito Kumazaki | 2015-09-29 |
| 9059554 | Discharge-pumped gas laser device | Akihiko KUROSU, Yosuke Ishizuka, Takashi Matsunaga, Osamu Wakabayashi | 2015-06-16 |
| 9055657 | Extreme ultraviolet light generation by polarized laser beam | Tsukasa HORI, Osamu Wakabayashi | 2015-06-09 |
| 8884257 | Chamber apparatus and extreme ultraviolet light generation system | Shinji Nagai, Kouji Ashikawa | 2014-11-11 |
| 8855164 | Laser apparatus | Yasufumi Kawasuji, Osamu Wakabayashi, Hideo Iwase | 2014-10-07 |
| 8813329 | Chamber replacing method | Hakaru Mizoguchi, Tatsuo Enami | 2014-08-26 |
| 8809821 | Holder device, chamber apparatus, and extreme ultraviolet light generation system | Hidenobu Kameda, Osamu Wakabayashi, Kouji Ashikawa | 2014-08-19 |
| 8748853 | Chamber apparatus | Shinji Nagai, Osamu Wakabayashi, Yutaka Shiraishi | 2014-06-10 |
| 8611393 | Laser apparatus | Takahito Kumazaki, Toru Suzuki, Satoshi Tanaka, Osamu Wakabayashi | 2013-12-17 |
| 7984539 | Chamber replacing method | Hakaru Mizoguchi, Tatsuo Enami | 2011-07-26 |
| 7006546 | Gas laser electrode, laser chamber employing the electrode, and gas laser device | Tsukasa HORI, Takayuki Yabu | 2006-02-28 |
| 6905783 | Steel sheet for porcelain enameling and method for production thereof, and enameled product and method for production thereof | Fumiaki Sato, Toshihira Hamada, Shuzo Oda, Yoshihiro Jono, Takahiro Hayashida +1 more | 2005-06-14 |
| 6810061 | Discharge electrode and discharge electrode manufacturing method | Tsukasa HORI, Akira Sumitani, Takayuki Yabu, Teiichirou Chiba, Hakaru Mizoguchi +1 more | 2004-10-26 |
| 6805975 | Steel sheet for procelain enameling and method for production thereof, and enameled product and method for production thereof | Fumiaki Sato, Toshihira Hamada, Shuzo Oda, Yoshihiro Jono, Takahiro Hayashida +1 more | 2004-10-19 |
| 6130904 | Gas supplementation method of excimer laser apparatus | Takanobu Ishihara, Hakaru Mizoguchi | 2000-10-10 |
| 5895549 | Method and apparatus for etching film layers on large substrates | Haruhiro Harry Goto, Jerry Wong | 1999-04-20 |
| 5663977 | Gas laser apparatus | Hakaru Mizoguchi | 1997-09-02 |