Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11363706 | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Yutaka Shiraishi, Toshihiro Nishisaka | 2022-06-14 |
| 11360391 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Fumio Iwamoto, Yutaka Shiraishi | 2022-06-14 |
| 11320740 | Target supply device, target supply method, and electronic device manufacturing method | Yutaka Shiraishi, Toshihiro Nishisaka, Hiroshi Someya, Yukio Watanabe | 2022-05-03 |
| 11310899 | Target supply device, target supply method, and electronic device manufacturing method | Yutaka Shiraishi | 2022-04-19 |
| 11043784 | Laser apparatus and EUV light generation system | Yoshifumi Ueno, Takayuki Yabu, Yoshiaki Kurosawa | 2021-06-22 |
| 10631393 | Chamber device and extreme ultraviolet light generating device | — | 2020-04-21 |
| 10629414 | Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator | Fumio Iwamoto, Yutaka Shiraishi, Osamu Wakabayashi | 2020-04-21 |
| 10512149 | Extreme UV light generation device | Shinji Okazaki | 2019-12-17 |
| 10506697 | Extreme ultraviolet light generation device | Fumio Iwamoto, Toshiyuki Hirashita | 2019-12-10 |
| 10306743 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-05-28 |
| 10251255 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2019-04-02 |
| 10251253 | Extreme ultraviolet light generation device | Fumio Iwamoto, Toshiyuki Hirashita | 2019-04-02 |
| 10237961 | Target supply device, processing device and processing method therefor | Yutaka Shiraishi, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki | 2019-03-19 |
| 10143074 | Filter and target supply apparatus | Tomohide Ichinose, Fumio Iwamoto, Yutaka Shiraishi, Hideo Hoshino | 2018-11-27 |
| 10136509 | Target supply device, processing device and processing method thefefor | Yutaka Shiraishi, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki | 2018-11-20 |
| 10117317 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-10-30 |
| 10028365 | Chamber device, target generation method, and extreme ultraviolet light generation system | Takanobu Ishihara, Takashi Saito, Yutaka Shiraishi | 2018-07-17 |
| 10028366 | Extreme UV light generation device and target recovery apparatus | Fumio Iwamoto, Kazukiyo Kamikanna | 2018-07-17 |
| 9894744 | Extreme ultraviolet light generation apparatus | Fumio Iwamoto, Yutaka Shiraishi, Takuya Ishii | 2018-02-13 |
| 9883574 | Target producing apparatus | Fumio Iwamoto, Takashi Saito, Osamu Wakabayashi | 2018-01-30 |
| 9877378 | System and method for generating extreme ultraviolet light | Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi, Hakaru Mizoguchi | 2018-01-23 |
| 9860967 | Target supply apparatus, extreme ultraviolet light generating apparatus, and target supply method | Hirokazu HOSODA | 2018-01-02 |
| 9854658 | Extreme ultraviolet light generation apparatus | Fumio Iwamoto, Masaki Nakano | 2017-12-26 |
| 9699877 | Extreme ultraviolet light generation apparatus including target droplet joining apparatus | Fumio Iwamoto, Hiroshi Umeda | 2017-07-04 |
| 9631014 | Method and reagent for diagnosis and/or evaluation of progression of graft-versus-host disease | Yasuo Kokai, Yasuyoshi Naishiro, Hiroyuki Tsutsumi, Kohzoh Imai | 2017-04-25 |