Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12207382 | Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Nozomu Oue | 2025-01-21 |
| 12185449 | EUV light generation apparatus, electronic device manufacturing method, and inspection method | Fumio Iwamoto | 2024-12-31 |
| 12150233 | Target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Hideki Shishiba | 2024-11-19 |
| 11474433 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yuki Takeda | 2022-10-18 |
| 11360391 | Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method | Fumio Iwamoto, Tsukasa HORI | 2022-06-14 |
| 11363706 | Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Toshihiro Nishisaka, Tsukasa HORI | 2022-06-14 |
| 11320740 | Target supply device, target supply method, and electronic device manufacturing method | Tsukasa HORI, Toshihiro Nishisaka, Hiroshi Someya, Yukio Watanabe | 2022-05-03 |
| 11310899 | Target supply device, target supply method, and electronic device manufacturing method | Tsukasa HORI | 2022-04-19 |
| 10955760 | Extreme ultraviolet light generation device and target supply device | Masaki Nakano | 2021-03-23 |
| 10629414 | Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator | Fumio Iwamoto, Tsukasa HORI, Osamu Wakabayashi | 2020-04-21 |
| 10524343 | Extreme ultraviolet light generation apparatus | Takanobu Ishihara, Toshihiro Nishisaka | 2019-12-31 |
| 10372041 | Target generation device and extreme ultraviolet light generation device | Toshihiro Nishisaka | 2019-08-06 |
| 10349508 | Target storage device | Toshihiro Nishisaka, Toshiyuki Hirashita, Takuya Ishii | 2019-07-09 |
| 10237961 | Target supply device, processing device and processing method therefor | Tsukasa HORI, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki | 2019-03-19 |
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takahisa FUJIMAKI, Takayuki Yabu, Yuta Takashima, Fumio Iwamoto | 2019-03-05 |
| 10143074 | Filter and target supply apparatus | Tomohide Ichinose, Fumio Iwamoto, Tsukasa HORI, Hideo Hoshino | 2018-11-27 |
| 10136509 | Target supply device, processing device and processing method thefefor | Tsukasa HORI, Shinya Ikesaka, Takanobu Ishihara, Toshiro Umeki | 2018-11-20 |
| 10073353 | Target supply device and EUV light generation apparatus | Hideki Shishiba | 2018-09-11 |
| 10028365 | Chamber device, target generation method, and extreme ultraviolet light generation system | Takanobu Ishihara, Tsukasa HORI, Takashi Saito | 2018-07-17 |
| 9894744 | Extreme ultraviolet light generation apparatus | Fumio Iwamoto, Tsukasa HORI, Takuya Ishii | 2018-02-13 |
| 9648715 | Target supply device | Toshiyuki Hirashita, Shinya Ikesaka | 2017-05-09 |
| 9039957 | Target material refinement device and target supply apparatus | Osamu Wakabayashi | 2015-05-26 |
| 8865342 | Polycarbonate resin composition and molded article | Toshiki Monden | 2014-10-21 |
| 8864906 | Method for producing silicon wafer | Hidetoshi Kuroki, Motoaki Yoshinaga, Masahiro Shibata | 2014-10-21 |
| 8835534 | Aromatic polycarbonate resin composition, method for producing the resin composition, and molded article of the same | Haruhiko Kurokawa, Yasushi Ogawa | 2014-09-16 |