Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10548209 | Chamber apparatus, target generation method, and EUV light generation apparatus | — | 2020-01-28 |
| 10524343 | Extreme ultraviolet light generation apparatus | Toshihiro Nishisaka, Yutaka Shiraishi | 2019-12-31 |
| 10237961 | Target supply device, processing device and processing method therefor | Tsukasa HORI, Yutaka Shiraishi, Shinya Ikesaka, Toshiro Umeki | 2019-03-19 |
| 10136509 | Target supply device, processing device and processing method thefefor | Tsukasa HORI, Yutaka Shiraishi, Shinya Ikesaka, Toshiro Umeki | 2018-11-20 |
| 10028365 | Chamber device, target generation method, and extreme ultraviolet light generation system | Tsukasa HORI, Takashi Saito, Yutaka Shiraishi | 2018-07-17 |
| 9338869 | EUV light source apparatus | Hiroshi Itafuji | 2016-05-10 |
| 9233782 | Target supply device | Toshihiro Nishisaka, Hiroshi Someya, Osamu Wakabayashi | 2016-01-12 |
| 9192038 | Target supply apparatus, control system, control apparatus and control circuit thereof | Hiroshi Itafuji | 2015-11-17 |
| 8710472 | Target output device and extreme ultraviolet light source apparatus | Youichi Sasaki, Kouji Kakizaki, Masahiro Inoue, Takayuki Yabu, Hideo Hoshino | 2014-04-29 |
| 8705035 | Target generation device | Tamotsu Abe, Osamu Wakabayashi | 2014-04-22 |
| 8698112 | Extreme ultraviolet light generation apparatus | Takayuki Yabu, Kouji Kakizaki, Tamotsu Abe, Osamu Wakabayashi | 2014-04-15 |
| 8629417 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Osamu Wakabayashi | 2014-01-14 |
| 8604451 | Target supply apparatus | Takayuki Yabu, Masaki Nakano, Hitoshi Nagano | 2013-12-10 |
| 8581220 | Target supply apparatus, control system, control apparatus and control circuit thereof | Hiroshi Itafuji | 2013-11-12 |
| 8569723 | Extreme ultraviolet light source apparatus | Shinji Nagai, Kouji Kakizaki, Tamotsu Abe | 2013-10-29 |
| 8530869 | Extreme ultraviolet light source apparatus | Shinji Nagai, Kouji Kakizaki, Hiroshi Sobukawa, Takeshi Murakami, Masahiro Inoue | 2013-09-10 |
| 8507883 | Extreme ultraviolet light source apparatus | Akira Endo, Hideo Hoshino, Kouji Kakizaki, Tamotsu Abe, Akira Sumitani +3 more | 2013-08-13 |
| 8343429 | Target supply unit of extreme ultraviolet light source apparatus and method of manufacturing the same | Takayuki Yabu, Masaki Nakano | 2013-01-01 |
| 8242474 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Osamu Wakabayashi | 2012-08-14 |
| 8003963 | Extreme ultraviolet light source apparatus | Shinji Nagai, Kouji Kakizaki, Hiroshi Sobukawa, Takeshi Murakami, Masahiro Inoue | 2011-08-23 |
| 7999241 | Extreme ultraviolet light source apparatus | Shinji Nagai, Kouji Kakizaki, Tamotsu Abe | 2011-08-16 |
| 7782922 | Excimer laser device operable at high repetition rate and having high band-narrowing efficiency | Tsukasa HORI, Kouji Kakizaki | 2010-08-24 |
| 6771685 | Discharge electrodes connecting structure for laser apparatus and laser apparatus therewith | Takayuki Yabu, Takashi Matsunaga, Yasufumi Kawasuji | 2004-08-03 |
| 6628693 | Discharge electrode for laser device | Hirotoshi Inoue, Tsukasa HORI | 2003-09-30 |
| 6570899 | Gas laser device | Takayuki Yabu, Shunsuke Yoshioka | 2003-05-27 |