| 11428892 |
Optical apparatus |
Yukio Watanabe |
2022-08-30 |
| 11320740 |
Target supply device, target supply method, and electronic device manufacturing method |
Tsukasa HORI, Yutaka Shiraishi, Toshihiro Nishisaka, Yukio Watanabe |
2022-05-03 |
| 10485085 |
Extreme ultraviolet light sensor unit and extreme ultraviolet light generation device |
Hisashi Nara, Takuya Ishii |
2019-11-19 |
| 10481354 |
Structure of connection between optical unit and optical path tube |
Yukio Watanabe, Yuki Kawashima, Yuto TANAKA |
2019-11-19 |
| 9253866 |
Gas lock device and extreme ultraviolet light generation apparatus |
Hideto Saito |
2016-02-02 |
| 9233782 |
Target supply device |
Takanobu Ishihara, Toshihiro Nishisaka, Osamu Wakabayashi |
2016-01-12 |
| 9229192 |
Mirror device |
Yukio Watanabe, Katsuhiko Wakana, Osamu Wakabayashi |
2016-01-05 |
| 9046651 |
Mirror device |
Yukio Watanabe, Katsuhiko Wakana, Osamu Wakabayashi |
2015-06-02 |
| 8804902 |
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus |
Tamotsu Abe, Takashi Suganuma, Hideo Hoshino, Akira Sumitani |
2014-08-12 |
| 8779402 |
Target supply device |
Takayuki Yabu, Yukio Watanabe, Toshihiro Nishisaka, Osamu Wakabayashi |
2014-07-15 |
| 8536550 |
Method and apparatus for cleaning collector mirror in EUV light generator |
Takeshi Asayama, Masato Moriya, Hideo Hoshino, Tamotsu Abe |
2013-09-17 |
| 8477412 |
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus |
Tamotsu Abe, Takashi Suganuma, Hideo Hoshino, Akira Sumitani |
2013-07-02 |
| 8450706 |
Extreme ultraviolet light source apparatus |
Tamotsu Abe, Takashi Suganuma, Takayuki Yabu |
2013-05-28 |
| 8445877 |
Extreme ultraviolet light source apparatus and target supply device |
Tamotsu Abe, Hideo Hoshino |
2013-05-21 |
| 8294129 |
Extreme ultraviolet light source apparatus |
Masato Moriya, Tamotsu Abe, Takashi Suganuma, Takayuki Yabu, Akira Sumitani +1 more |
2012-10-23 |
| 8258492 |
Differential evacuation system |
Yukio Watanabe |
2012-09-04 |
| 8212228 |
Extreme ultra violet light source apparatus |
Tamotsu Abe, Toshihiro Nishisaka, Masato Moriya, Takeshi Asayama, Hideo Hoshino +1 more |
2012-07-03 |
| 8173984 |
Extreme ultraviolet light source apparatus |
Masato Moriya, Tamotsu Abe, Takashi Suganuma, Takayuki Yabu, Akira Sumitani +1 more |
2012-05-08 |
| 8003962 |
Extreme ultraviolet light source apparatus and nozzle protection device |
Tamotsu Abe, Hideo Hoshino |
2011-08-23 |
| 7923705 |
Extreme ultra violet light source apparatus |
Masato Moriya, Tamotsu Abe, Takashi Suganuma, Takayuki Yabu, Akira Sumitani +1 more |
2011-04-12 |
| 7880153 |
Extreme ultra violet light source apparatus |
Takashi Suganuma, Tamotsu Abe, Akira Sumitani |
2011-02-01 |
| 7683355 |
Extreme ultra violet light source apparatus |
Masato Moriya, Tamotsu Abe, Takashi Suganuma, Takayuki Yabu, Akira Sumitani |
2010-03-23 |