Issued Patents All Time
Showing 1–25 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841267 | Energy measuring apparatus and excimer laser apparatus | Yosuke Watanabe | 2023-12-12 |
| 11808629 | Sensor degradation evaluation method | — | 2023-11-07 |
| 11384598 | Screen device | Hirotsugu Toda | 2022-07-12 |
| 11079686 | Excimer laser apparatus and electronic-device manufacturing method | Keisuke Ishida, Natsuhiko KOUNO, Takeshi Asayama, Takashi KUSAMA | 2021-08-03 |
| 10950235 | Information processing device, information processing method and program recording medium | — | 2021-03-16 |
| 10920488 | Roll screen device | Hirotsugu Toda | 2021-02-16 |
| 10890484 | Wavelength measuring device | — | 2021-01-12 |
| 10502623 | Line-narrowed KrF excimer laser apparatus | — | 2019-12-10 |
| 10151640 | Light beam measurement device, laser apparatus, and light beam separator | Osamu Wakabayashi, Yoshinobu WATABE | 2018-12-11 |
| 10027084 | Alignment system and extreme ultraviolet light generation system | Osamu Wakabayashi | 2018-07-17 |
| 9894743 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Miwa Igarashi, Hiroaki Nakarai | 2018-02-13 |
| 9882343 | Narrow band laser apparatus | Takeshi Ohta, Keisuke Ishida, Takashi KUSAMA | 2018-01-30 |
| 9841684 | Light source apparatus and data processing method | Hiroshi Tanaka, Akihiko KUROSU, Hiroyuki Masuda, Hideyuki Ochiai, Osamu Wakabayashi | 2017-12-12 |
| 9835495 | Light beam measurement device, laser apparatus, and light beam separator | Osamu Wakabayashi, Yoshinobu WATABE | 2017-12-05 |
| 9667019 | Laser apparatus and extreme ultraviolet light generation system | Takashi Suganuma, Osamu Wakabayashi | 2017-05-30 |
| 9574935 | System for generating extreme ultra violet light | Osamu Wakabayashi | 2017-02-21 |
| 9439275 | System and method for generating extreme ultraviolet light | Osamu Wakabayashi | 2016-09-06 |
| 9363878 | Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjusters | Osamu Wakabayashi | 2016-06-07 |
| 9325150 | Alignment system and extreme ultraviolet light generation system | Osamu Wakabayashi | 2016-04-26 |
| 9301379 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Miwa Igarashi, Hiroaki Nakarai | 2016-03-29 |
| 9277635 | Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light | Hideyuki Hayashi, Osamu Wakabayashi | 2016-03-01 |
| 9271382 | Laser apparatus and extreme ultraviolet light generation apparatus | Osamu Wakabayashi | 2016-02-23 |
| 9184551 | Laser apparatus and extreme ultraviolet light generation system | Takashi Suganuma, Hidenobu Kameda, Osamu Wakabayashi | 2015-11-10 |
| 9128391 | Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus | Osamu Wakabayashi | 2015-09-08 |
| 9099836 | Laser beam amplifier and laser apparatus using the same | Krzysztof Nowak, Osamu Wakabayashi | 2015-08-04 |