Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081853 | Optical element moving apparatus, narrowed-line laser apparatus, and method for manufacturing electronic device | Masahide KATO, Hiroshi Furusato | 2021-08-03 |
| 10151640 | Light beam measurement device, laser apparatus, and light beam separator | Masato Moriya, Osamu Wakabayashi | 2018-12-11 |
| 9835495 | Light beam measurement device, laser apparatus, and light beam separator | Masato Moriya, Osamu Wakabayashi | 2017-12-05 |