Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12224549 | Line narrowing module, gas laser apparatus, and method for manufacturing electronic devices | Junichi Maekawa | 2025-02-11 |
| 12155168 | Line narrowing gas laser device and electronic device manufacturing method | Yusuke Saito, Masanori YASHIRO, Yosuke Watanabe, Tokinori Terao | 2024-11-26 |
| 11271361 | Excimer laser apparatus and method for manufacturing electronic device | Keisuke Ishida, Satoshi Komuro | 2022-03-08 |
| 11081853 | Optical element moving apparatus, narrowed-line laser apparatus, and method for manufacturing electronic device | Yoshinobu WATABE, Masahide KATO | 2021-08-03 |
| 10741991 | Narrowband laser apparatus and spectral linewidth measuring apparatus | Takahito Kumazaki, Keisuke Ishida | 2020-08-11 |
| 10615565 | Line narrowed laser apparatus | Keisuke Ishida, Takeshi Ohta, Takahito Kumazaki, Osamu Wakabayashi | 2020-04-07 |
| 10283927 | Line narrowed laser apparatus | Takeshi Ohta, Natsuhiko KOUNO, Osamu Wakabayashi, Takahito Kumazaki | 2019-05-07 |