Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8957356 | System and method for generating extreme ultraviolet light | Osamu Wakabayashi | 2015-02-17 |
| 8847181 | System and method for generating extreme ultraviolet light | Hideyuki Hayashi, Osamu Wakabayashi | 2014-09-30 |
| 8804778 | Laser apparatus and extreme ultraviolet light source apparatus | Osamu Wakabayashi, Akira Endo, Krzysztof Nowak, Takashi Suganuma | 2014-08-12 |
| 8742379 | Window unit, window device, laser apparatus, and extreme ultraviolet light generation system | Hidenobu Kameda, Osamu Wakabayashi | 2014-06-03 |
| 8698114 | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device | Hideo Hoshino, Hakaru Mizoguchi, Osamu Wakabayashi | 2014-04-15 |
| 8698113 | Chamber apparatus and extreme ultraviolet (EUV) light generation apparatus including the chamber apparatus | Osamu Wakabayashi | 2014-04-15 |
| 8698116 | Extreme ultra violet light source apparatus | Osamu Wakabayashi, Tamotsu Abe, Takashi Suganuma, Akira Endo, Akira Sumitani | 2014-04-15 |
| 8692220 | Extreme ultraviolet light source device and control method for extreme ultraviolet light source device | Osamu Wakabayashi | 2014-04-08 |
| 8592787 | Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device | Osamu Wakabayashi, Georg Soumagne | 2013-11-26 |
| 8559099 | Laser beam amplifier and laser apparatus using the same | Krzysztof Nowak, Osamu Wakabayashi | 2013-10-15 |
| 8536550 | Method and apparatus for cleaning collector mirror in EUV light generator | Takeshi Asayama, Hiroshi Someya, Hideo Hoshino, Tamotsu Abe | 2013-09-17 |
| 8536551 | Extreme ultra violet light source apparatus | Osamu Wakabayashi, Tamotsu Abe, Takashi Suganuma, Akira Endo, Akira Sumitani | 2013-09-17 |
| 8507885 | Semiconductor exposure device using extreme ultra violet radiation | Osamu Wakabayashi, Georg Soumagne | 2013-08-13 |
| 8502178 | Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon | Hideyuki Hayashi, Tooru Abe | 2013-08-06 |
| 8481983 | Extreme ultra violet light source apparatus | Hiroshi Komori, Takeshi Asayama | 2013-07-09 |
| 8476609 | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device | Akira Endo, Krzysztof Nowak, Hideo Hoshino, Tatsuya Ariga, Osamu Wakabayashi | 2013-07-02 |
| 8445876 | Extreme ultraviolet light source apparatus | Takashi Suganuma, Tamotsu Abe, Kouji Kakizaki, Osamu Wakabayashi | 2013-05-21 |
| 8399870 | Extreme ultraviolet light source device and control method for extreme ultraviolet light source device | Osamu Wakabayashi | 2013-03-19 |
| 8395133 | Apparatus and method of adjusting a laser light source for an EUV source device | Hideo Hoshino, Osamu Wakabayashi, Hakaru Mizoguchi | 2013-03-12 |
| 8316913 | Sliding screen door | Mitsuhiko Chino, Hirotsugu Toda, Yoji Kamosawa | 2012-11-27 |
| 8294129 | Extreme ultraviolet light source apparatus | Tamotsu Abe, Takashi Suganuma, Hiroshi Someya, Takayuki Yabu, Akira Sumitani +1 more | 2012-10-23 |
| 8256441 | Method for cleaning optical element of EUV light source device and optical element cleaning device | Yoshifumi Ueno, Tamotsu Abe, Akira Sumitani | 2012-09-04 |
| 8242472 | Extreme ultraviolet light source device and control method for extreme ultraviolet light source device | Osamu Wakabayashi | 2012-08-14 |
| 8227778 | Semiconductor exposure device using extreme ultra violet radiation | Osamu Wakabayashi, Georg Soumagne | 2012-07-24 |
| 8212228 | Extreme ultra violet light source apparatus | Tamotsu Abe, Toshihiro Nishisaka, Hiroshi Someya, Takeshi Asayama, Hideo Hoshino +1 more | 2012-07-03 |