Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11451003 | Laser gas regenerating apparatus and electronic device manufacturing method | Hiroaki TSUSHIMA, Satoshi Tanaka, Yousuke FUJIMAKI, Osamu Wakabayashi | 2022-09-20 |
| 11239625 | Laser apparatus including gas supply device and exhausting device | — | 2022-02-01 |
| 11079686 | Excimer laser apparatus and electronic-device manufacturing method | Keisuke Ishida, Masato Moriya, Natsuhiko KOUNO, Takashi KUSAMA | 2021-08-03 |
| 10971886 | Laser apparatus | Hiroyuki Masuda | 2021-04-06 |
| 10965090 | Laser apparatus | — | 2021-03-30 |
| 10177520 | Excimer laser apparatus and excimer laser system | Osamu Wakabayashi, Kouji Kakizaki | 2019-01-08 |
| 10050403 | Excimer laser chamber device | Hisakazu KATSUUMI, Kazuya Takezawa, Kouji Kakizaki, Hiroaki TSUSHIMA | 2018-08-14 |
| 9991665 | Laser system | Hiroshi Umeda, Osamu Wakabayashi | 2018-06-05 |
| 9853410 | Gas laser device and control method therefor | Hiroaki TSUSHIMA, Kouji Kakizaki, Osamu Wakabayashi | 2017-12-26 |
| 9837780 | Excimer laser apparatus and excimer laser system | Osamu Wakabayashi, Kouji Kakizaki | 2017-12-05 |
| 9806490 | Laser system | Hiroshi Umeda, Osamu Wakabayashi | 2017-10-31 |
| 9742141 | Laser chamber | Hiroaki TSUSHIMA, Kouji Kakizaki, Takashi Matsunaga, Hisakazu KATSUUMI, Hiroshi Umeda +1 more | 2017-08-22 |
| 9601893 | Laser apparatus | Kouji Kakizaki, Osamu Wakabayashi | 2017-03-21 |
| 9331450 | Laser apparatus | Hakaru Mizoguchi, Kouji Kakizaki, Hiroaki TSUSHIMA, Osamu Wakabayashi, Kazuya Takezawa | 2016-05-03 |
| 8901524 | Extreme ultraviolet light source apparatus | Kouji Kakizaki, Akira Endo, Shinji Nagai | 2014-12-02 |
| 8610095 | Extreme ultraviolet light source device | Takayuki Yabu, Fumika Yoshida, Osamu Wakabayashi | 2013-12-17 |
| 8586954 | Extreme ultraviolet light source apparatus | Kouji Kakizaki, Akira Endo, Shinji Nagai | 2013-11-19 |
| 8536550 | Method and apparatus for cleaning collector mirror in EUV light generator | Hiroshi Someya, Masato Moriya, Hideo Hoshino, Tamotsu Abe | 2013-09-17 |
| 8481983 | Extreme ultra violet light source apparatus | Masato Moriya, Hiroshi Komori | 2013-07-09 |
| 8212228 | Extreme ultra violet light source apparatus | Tamotsu Abe, Toshihiro Nishisaka, Hiroshi Someya, Masato Moriya, Hideo Hoshino +1 more | 2012-07-03 |
| 8158959 | Extreme ultraviolet light source apparatus | Kouji Kakizaki, Akira Endo, Shinji Nagai | 2012-04-17 |