Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12113326 | Laser device and electronic device manufacturing method | Yoichi Sasaki, Kouji Kakizaki | 2024-10-08 |
| 10447001 | Laser unit | Minoru Taniyama, Osamu Wakabayashi | 2019-10-15 |
| 10306743 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2019-05-28 |
| 10251255 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2019-04-02 |
| 10117317 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2018-10-30 |
| 9954339 | Laser unit and extreme ultraviolet light generating system | Takashi Suganuma, Osamu Wakabayashi | 2018-04-24 |
| 9877378 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2018-01-23 |
| 9507248 | Two-beam interference apparatus and two-beam interference exposure system | Shinji Okazaki, Junichi Fujimoto, Takashi Matsunaga, Kouji Kakizaki, Osamu Wakabayashi | 2016-11-29 |
| 9510434 | Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam | Yasufumi Kawasuji, Osamu Wakabayashi | 2016-11-29 |
| 9497842 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2016-11-15 |
| 9465307 | Cleaning method for EUV light generation apparatus | Shinji Nagai | 2016-10-11 |
| 9402297 | Extreme ultraviolet light generation system | Osamu Wakabayashi, Tatsuya Yanagida | 2016-07-26 |
| 9373926 | Laser chamber and discharge excitation gas laser apparatus | Hiroaki TSUSHIMA, Junichi Fujimoto, Hiroaki Nakarai, Natsushi Suzuki | 2016-06-21 |
| 9362703 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Takashi Suganuma, Hideo Hoshino, Osamu Wakabayashi | 2016-06-07 |
| 9331450 | Laser apparatus | Takeshi Asayama, Kouji Kakizaki, Hiroaki TSUSHIMA, Osamu Wakabayashi, Kazuya Takezawa | 2016-05-03 |
| 9265136 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Osamu Wakabayashi | 2016-02-16 |
| 9072153 | Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target | Osamu Wakabayashi, Tatsuya Yanagida | 2015-06-30 |
| 8891161 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Takashi Suganuma, Hideo Hoshino, Osamu Wakabayashi | 2014-11-18 |
| 8813329 | Chamber replacing method | Junichi Fujimoto, Tatsuo Enami | 2014-08-26 |
| 8809819 | Target supply unit and extreme ultraviolet light generation apparatus | Takayuki Yabu, Hiroshi Umeda | 2014-08-19 |
| 8785895 | Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus | Hiroshi Umeda, Taku Yamazaki, Toshihiro Nishisaka | 2014-07-22 |
| 8779401 | Target supply unit | Takayuki Yabu, Toshihiro Nishisaka | 2014-07-15 |
| 8742378 | Target supply unit | Hidenobu Kameda | 2014-06-03 |
| 8710473 | Droplet generation and detection device, and droplet control device | Kouji Kakizaki, Osamu Wakabayashi, Masahiro Inoue | 2014-04-29 |
| 8698114 | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device | Masato Moriya, Hideo Hoshino, Osamu Wakabayashi | 2014-04-15 |