Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8813329 | Chamber replacing method | Junichi Fujimoto, Hakaru Mizoguchi | 2014-08-26 |
| 7984539 | Chamber replacing method | Junichi Fujimoto, Hakaru Mizoguchi | 2011-07-26 |
| 7196796 | Wavelength detecting apparatus, laser apparatus, and wavelength detecting method | Masato Moriya, Hirokazu Kubo, Masashi Shinbori, Toru Suzuki | 2007-03-27 |
| 6819699 | Arf excimer laser device, scanning type exposure device and ultraviolet laser device | Osamu Wakabayashi, Katsutomo Terashima, Kiwamu Takehisa, Tsukasa HORI, Hakaru Mizoguchi | 2004-11-16 |
| 6636297 | Vacuum ultraviolet laser wavelength measuring apparatus | Osamu Wakabayashi, Shinji Nagai | 2003-10-21 |
| 6337872 | Once through fan for excimer laser apparatus | Hisashi Nara, Kiyoharu Nakao, Hakaru Mizoguchi, Toshihiro Nishisaka | 2002-01-08 |
| 6243163 | Wavelength detector | Osamu Wakabayashi, Shinji Nagai, Toru Suzuki, Takeshi Ohta, Hirokazu Kubo | 2001-06-05 |