Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801967 | Mask inspection apparatus, switching method, and mask inspection method | Tetsuya Sendoda, Takayuki Ishida | 2020-10-13 |
| 10706527 | Correction method, correction apparatus, and inspection apparatus | Tsunehito KOHYAMA, Haruhiko Kusunose, Hiroki MIYAI, Itaru Matsugu | 2020-07-07 |
| 10319088 | Inspection apparatus of EUV mask and its focus adjustment method | Hiroki MIYAI | 2019-06-11 |
| 10305246 | Iodine laser based defense system | — | 2019-05-28 |
| 10156664 | Mask inspection apparatus and mask inspection method | Hiroki MIYAI | 2018-12-18 |
| 9991670 | Laser light source device and inspection device | Jun Sakuma | 2018-06-05 |
| 9719859 | Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams | Haruhiko Kusunose | 2017-08-01 |
| 9588421 | Pellicle inspection apparatus | Atsushi TAJIMA, Haruhiko Kusunose | 2017-03-07 |
| 9583908 | Pulsed iodine laser apparatus | — | 2017-02-28 |
| 9350137 | Laser processing method and laser processing system | — | 2016-05-24 |
| 9209594 | Oxygen laser oscillator | — | 2015-12-08 |
| 9142934 | Oxygen laser oscillator | — | 2015-09-22 |
| 8130340 | Liquid crystal display and light guide plate | Tadahiro Ohmi, Yasuyuki Shirai, Mitsuo Matsumoto, Tokuo Ikari, Toshiaki Sato +6 more | 2012-03-06 |
| 7796343 | Photomask inspection apparatus | Haruhiko Kusunose, Naoki Awamura | 2010-09-14 |
| 7787076 | Backlight unit for liquid crystal display | Tadahiro Ohmi, Yasuyuki Shirai | 2010-08-31 |
| 7764414 | Illumination apparatus and illumination method | Haruhiko Kusunose | 2010-07-27 |
| 7663734 | Pattern writing system and pattern writing method | Tadahiro Ohmi, Shigetoshi Sugawa, Kimio Yanagida | 2010-02-16 |
| 7474383 | Mask making method, mask making device, and mask drawing device | Tadahiro Ohmi, Shigetoshi Sugawa | 2009-01-06 |
| 7099365 | Oscillation method and device of fluorine molecular laser | Tatsumi Goto | 2006-08-29 |
| 6839373 | Ultra-narrow band flourine laser apparatus | Hakaru Mizoguchi, Shinji Nagai, Tatsumi Gotou | 2005-01-04 |
| 6819699 | Arf excimer laser device, scanning type exposure device and ultraviolet laser device | Tatsuo Enami, Osamu Wakabayashi, Katsutomo Terashima, Tsukasa HORI, Hakaru Mizoguchi | 2004-11-16 |
| 6628682 | Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus | Kouji Shio, Shinji Nagai, Yasuaki Iwata, Osamu Wakabayashi | 2003-09-30 |
| 6594291 | Ultra narrow band fluorine laser apparatus and fluorine exposure apparatus | — | 2003-07-15 |
| 6560269 | Fluorine laser device | Tatsuya Ariga, Osamu Wakabayashi | 2003-05-06 |
| 5381437 | High-power solid-state laser resonator | Kouji Kuwabara, Makoto Yano | 1995-01-10 |