Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050184 | Mask inspection method and mask inspection apparatus | Keita Saito, Haruhiko Kusunose | 2024-07-30 |
| 11353802 | Optical device, and method for preventing contamination of optical device | Haruhiko Kusunose | 2022-06-07 |
| 10706527 | Correction method, correction apparatus, and inspection apparatus | Haruhiko Kusunose, Kiwamu Takehisa, Hiroki MIYAI, Itaru Matsugu | 2020-07-07 |
| 10539511 | Detection method, inspection method, detection apparatus, and inspection apparatus | Masayasu Nishizawa, Hironobu Suzuki | 2020-01-21 |