Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050184 | Mask inspection method and mask inspection apparatus | Keita Saito, Tsunehito KOHYAMA | 2024-07-30 |
| 11353802 | Optical device, and method for preventing contamination of optical device | Tsunehito KOHYAMA | 2022-06-07 |
| 10712287 | Inspection device and inspection method | Masayasu Nishizawa, Tomohiro Suzuki | 2020-07-14 |
| 10706527 | Correction method, correction apparatus, and inspection apparatus | Tsunehito KOHYAMA, Kiwamu Takehisa, Hiroki MIYAI, Itaru Matsugu | 2020-07-07 |
| 10645289 | Optical apparatus and vibration removing method | — | 2020-05-05 |
| 9719859 | Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams | Kiwamu Takehisa | 2017-08-01 |
| 9638739 | Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask | Hiroki MIYAI | 2017-05-02 |
| 9588421 | Pellicle inspection apparatus | Kiwamu Takehisa, Atsushi TAJIMA | 2017-03-07 |
| 9117869 | Chucking device and chucking method | — | 2015-08-25 |
| 9013787 | Microscope and inspection apparatus | Takamasa Tsubouchi | 2015-04-21 |
| 8760642 | Substrate inspection apparatus and mask inspection apparatus | Zenta Hori, Koichi Moriizumi | 2014-06-24 |
| 8305681 | Light source apparatus | Jun Sakuma | 2012-11-06 |
| 8069008 | Depth measurement apparatus and depth measurement method | — | 2011-11-29 |
| 7907270 | Inspection apparatus and method, and production method for pattern substrates | — | 2011-03-15 |
| 7796343 | Photomask inspection apparatus | Kiwamu Takehisa, Naoki Awamura | 2010-09-14 |
| 7764414 | Illumination apparatus and illumination method | Kiwamu Takehisa | 2010-07-27 |
| 7643157 | Phase shift amount measurement apparatus and transmittance measurement apparatus | Hideo Takizawa, Koji Miyazaki | 2010-01-05 |
| 7548309 | Inspection apparatus, inspection method, and manufacturing method of pattern substrate | Tomoya Tamura | 2009-06-16 |
| 6858859 | Optically scanning apparatus and defect inspection system | — | 2005-02-22 |
| 6665326 | Light source device | — | 2003-12-16 |
| 6654110 | Image pickup apparatus and defect inspection apparatus for photomask | Makoto Yonezawa | 2003-11-25 |
| 6195202 | Laser microscope and a pattern inspection apparatus using such laser microscope | — | 2001-02-27 |
| 6043932 | Laser microscope and a pattern inspection apparatus using such laser microscope | — | 2000-03-28 |
| 5772842 | Apparatus for stripping pellicle | Shinichiro Tanaka, Sigeru Wada | 1998-06-30 |
| 5771097 | Mach-zehnder type interferometer | Naoki Awamura | 1998-06-23 |