Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5428203 | Electron beam exposing apparatus with a stencil mask kept at a constant temperature | — | 1995-06-27 |
| 5426503 | Method of testing a phase shift mask and a testing apparatus used therein in the ultraviolet wavelength range | — | 1995-06-20 |
| 5275895 | Method of manufacturing phase-shifting mask | — | 1994-01-04 |