NA

Naoki Awamura

LA Lasertec: 2 patents #12 of 52Top 25%
Overall (All Time): #2,126,830 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7796343 Photomask inspection apparatus Kiwamu Takehisa, Haruhiko Kusunose 2010-09-14
5771097 Mach-zehnder type interferometer Haruhiko Kusunose 1998-06-23