Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8760642 | Substrate inspection apparatus and mask inspection apparatus | Zenta Hori, Haruhiko Kusunose | 2014-06-24 |
| 6343370 | Apparatus and process for pattern distortion detection for semiconductor process and semiconductor device manufactured by use of the apparatus or process | Hironobu Taoka | 2002-01-29 |
| 6298473 | Apparatus and method for inhibiting pattern distortions to correct pattern data in a semiconductor device | Yusaku Ono | 2001-10-02 |
| 6271852 | boundary processing of oblique overlapping graphics to achieve dimensionally accurate electron beam irradiation | Kinya Kamiyama, Hironobu Taoka | 2001-08-07 |
| 6088520 | Method of producing highly precise charged beam drawing data divided into plurality of drawing fields | Hironobu Taoka, Kinya Kamiyama | 2000-07-11 |
| 6069971 | Pattern comparison inspection system and method employing gray level bit map | Makoto Kanno | 2000-05-30 |
| 5812412 | Charged beam pattern data generating method and a charged beam pattern data generating apparatus | Kinya Kamiyama, Makoto Kanno, Hironobu Taoka, Hiroomi Nakao, Kazuhiro Yamazaki | 1998-09-22 |
| 5796408 | Charged particle beam drawing data production apparatus and charged particle beam drawing system | Kinya Kamiyama, Makoto Kanno, Hironobu Taoka | 1998-08-18 |
| 5153441 | Electron-beam exposure apparatus | — | 1992-10-06 |
| 5086398 | Electron beam exposure method | — | 1992-02-04 |
| 5008830 | Method of preparing drawing data for charged beam exposure system | Takeshi Fujino | 1991-04-16 |
| 4984199 | Semiconductor memory cells having common contact hole | Masahiro Yoneda, Masahiro Hatanaka, Yoshio Kohno, Shinichi Satoh, Hidekazu Oda | 1991-01-08 |
| 4887137 | Semiconductor memory device | Masahiro Yoneda, Masahiro Hatanaka, Yoshio Kohno, Shinichi Satoh, Hidekazu Oda | 1989-12-12 |
| 4794646 | Charged beam pattern defect inspection apparatus | Susumu Takeuchi | 1988-12-27 |