Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9582617 | Simulation device and simulation program for simulating process using first and second masks | — | 2017-02-28 |
| 8930857 | Mask data verification apparatus, design layout verification apparatus, method thereof, and computer program thereof | — | 2015-01-06 |
| 8719740 | Semiconductor device which is subjected to optical proximity correction | Yusaku Ono | 2014-05-06 |
| 8464192 | Lithography verification apparatus and lithography simulation program | — | 2013-06-11 |
| 8458627 | Semiconductor device including logic circuit having areas of different optical proximity accuracy | Yusaku Ono | 2013-06-04 |
| 8103977 | Semiconductor device and its manufacturing method, semiconductor manufacturing mask, and optical proximity processing method | Yusaku Ono | 2012-01-24 |
| 6760892 | Apparatus for evaluating lithography process margin simulating layout pattern of semiconductor device | Akihiro Nakae | 2004-07-06 |
| 6427225 | Method and apparatus for verification of a circuit layout | Osamu Kitada, Terutoshi Yamasaki | 2002-07-30 |
| 6350977 | Pattern distortion detecting method and apparatus and recording medium for pattern distortion detection | — | 2002-02-26 |
| 6343370 | Apparatus and process for pattern distortion detection for semiconductor process and semiconductor device manufactured by use of the apparatus or process | Koichi Moriizumi | 2002-01-29 |
| 6271852 | boundary processing of oblique overlapping graphics to achieve dimensionally accurate electron beam irradiation | Kinya Kamiyama, Koichi Moriizumi | 2001-08-07 |
| 6088520 | Method of producing highly precise charged beam drawing data divided into plurality of drawing fields | Kinya Kamiyama, Koichi Moriizumi | 2000-07-11 |
| 5812412 | Charged beam pattern data generating method and a charged beam pattern data generating apparatus | Koichi Moriizumi, Kinya Kamiyama, Makoto Kanno, Hiroomi Nakao, Kazuhiro Yamazaki | 1998-09-22 |
| 5796408 | Charged particle beam drawing data production apparatus and charged particle beam drawing system | Kinya Kamiyama, Koichi Moriizumi, Makoto Kanno | 1998-08-18 |