Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9368385 | Manufacturing method for semiconductor integrated circuit device | Akira Imai, Toshiaki Iwamatsu | 2016-06-14 |
| 8951860 | Manufacturing method of semiconductor device | Yasushi Ishii, Hiraku Chakihara, Takahiro Maruyama | 2015-02-10 |
| 6916749 | Method of manufacturing semiconductor device | Kouichirou Tsujita | 2005-07-12 |
| 6801297 | Exposure condition determination system | — | 2004-10-05 |
| 6760892 | Apparatus for evaluating lithography process margin simulating layout pattern of semiconductor device | Hironobu Taoka | 2004-07-06 |
| 6048647 | Phase shift mask of attenuation type and manufacturing method thereof | Junji Miyazaki, Nobuyuki Yoshioka, Hidehiko Kozawa | 2000-04-11 |
| 5989756 | Photo mask and method for fabricating semiconductor devices using the photo mask | — | 1999-11-23 |
| 5955227 | Pattern determination method | Kouichirou Tsujita, Junjiro Sakai | 1999-09-21 |
| 5888677 | Exposure mask, method of fabricating same, and method of manufacturing semiconductor device | — | 1999-03-30 |
| 5867253 | Method of correcting light proximity effect | — | 1999-02-02 |