Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690201 | Drawing method and method of manufacturing article | Masato Muraki | 2017-06-27 |
| 9551926 | Determination method, storage medium and information processing apparatus | Yuichi Gyoda, Koji Mikami | 2017-01-24 |
| 9448495 | Resist pattern calculation method and calculation program storage medium | Ryo Nakayama, Koji Mikami, Hiroyuki Ishii | 2016-09-20 |
| 9406510 | Pattern forming method and article manufacturing method | Yuichi Gyoda | 2016-08-02 |
| 9268239 | Exposure method and storage medium | Yuichi Gyoda | 2016-02-23 |
| 9036897 | Storage medium storing computer program for determining at least one of exposure condition and mask pattern | Hiroyuki Ishii, Yuichi Gyoda, Koji Mikami | 2015-05-19 |
| 8949748 | Recording medium recording program for generating mask data, method for manufacturing mask, and exposure method | Hiroyuki Ishii | 2015-02-03 |
| 8867023 | Method for determining exposure condition and computer-readable storage media storing program for determining exposure condition | — | 2014-10-21 |
| 8739079 | Recording medium and determination method | Axelrad Valery | 2014-05-27 |
| 8582083 | Effective light source shape database generation method, optical image calculation method, recording medium, exposure method, and device fabrication method | Hiroto Yoshii, Koji Mikami | 2013-11-12 |
| 8584055 | Non-transitory computer-readable storage medium, decision method and computer for deciding exposure condition using evaluation item of interest and auxiliary evaluation item | Yuichi Gyoda | 2013-11-12 |
| 8339579 | Exposure method | — | 2012-12-25 |
| 8334968 | Recording medium storing program for determining exposure parameter, exposure method, and method of manufacturing device | Koji Mikami | 2012-12-18 |
| 8085386 | Method for determining exposure condition and computer-readable storage media storing program for determining exposure condition | — | 2011-12-27 |
| 8049191 | Method of transferring pattern of reticle, computer readable storage medium, and method of manufacturing device | Koji Mikami, Hiroyuki Ishii | 2011-11-01 |
| 8029954 | Exposure method and memory medium storing computer program | Koji Mikami, Hiroyuki Ishii | 2011-10-04 |
| 7642022 | Parameter determination method, exposure method, device fabrication method, and storage medium | Hiroto Yoshii, Koji Mikami | 2010-01-05 |
| 6938238 | Method of manufacturing electronic device | Takashi Okagawa, Tetsuya Yamada, Atsushi Ueno, Atsumi Yamaguchi | 2005-08-30 |
| 6916749 | Method of manufacturing semiconductor device | Akihiro Nakae | 2005-07-12 |
| 6849486 | Method of manufacturing a thinned gate electrode utilizing protective films and etching | Tetsuya Yamada, Atsushi Ueno, Atsumi Yamaguchi, Takashi Okagawa | 2005-02-01 |
| 6774043 | Method of manufacturing semiconductor device | Atsumi Yamaguchi | 2004-08-10 |
| 6607992 | Antireflection coating and semiconductor device manufacturing method | Atsumi Yamaguchi, Junjiro Sakai, Kouji Oda, Koichiro Narimatsu | 2003-08-19 |
| 6518196 | Method of manufacturing semiconductor device | Tetsuya Yamada, Atsumi Yamaguchi | 2003-02-11 |
| 6461800 | Resist patterning method | — | 2002-10-08 |
| 5955227 | Pattern determination method | Junjiro Sakai, Akihiro Nakae | 1999-09-21 |