Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117795 | Fluctuation amount estimation device in machine tool and correction amount calculation device | Naruhiro Irino, Masahiro Shimoike | 2024-10-15 |
| 11809156 | Thermal displacement correction method for machine tool | Naruhiro Irino | 2023-11-07 |
| 6943458 | Semiconductor device and manufacturing method thereof, and registration accuracy measurement enhancement method | — | 2005-09-13 |
| 6849957 | Photomask including auxiliary mark area, semiconductor device and manufacturing method thereof | Masahiko Takeuchi, Atsushi Ueno | 2005-02-01 |
| 6667505 | Semiconductor device having a plurality of capacitors aligned at regular intervals | Shigeru Shiratake | 2003-12-23 |
| 6607992 | Antireflection coating and semiconductor device manufacturing method | Kouichirou Tsujita, Atsumi Yamaguchi, Junjiro Sakai, Kouji Oda | 2003-08-19 |
| 6596603 | Semiconductor device and manufacturing method thereof, and registration accuracy measurement enhancement method | — | 2003-07-22 |
| 6323560 | Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photo mask and method of exposure thereof | Shigenori Yamashita, Nobuyuki Yoshioka, Shinya Soeda, Atsushi Hachisuka, Koji Taniguchi +3 more | 2001-11-27 |
| 6114072 | Reticle having interlocking dicing regions containing monitor marks and exposure method and apparatus utilizing same | — | 2000-09-05 |
| 6068952 | Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photomask and method of exposure thereof | Shigenori Yamashita, Nobuyuki Yoshioka, Shinya Soeda, Atsushi Hachisuka, Koji Taniguchi +3 more | 2000-05-30 |
| 5991007 | Step and scan exposure system and semiconductor device manufactured using said system | — | 1999-11-23 |
| 5892291 | Registration accuracy measurement mark | Shigenori Yamashita, Nobuyuki Yoshioka, Shinya Soeda, Atsushi Hachisuka, Koji Taniguchi +3 more | 1999-04-06 |
| 5869906 | Registration accuracy measurement mark for semiconductor devices | — | 1999-02-09 |
| 5646452 | Registration accuracy measurement mark for semiconductor devices | — | 1997-07-08 |