Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043772 | Manufacturing method and manufacturing system of semiconductor device | Toshiharu Miwa, Junko Konishi, Toshihide Kawachi, Takeshi Tashiro, Hidekimi Fudo | 2011-10-25 |
| 6617080 | Photomask, semiconductor device, and method for exposing through photomask | Toshihide Kawachi, Takuya Matsushita, Yuki Miyamoto, Atsushi Ueno, Shinroku Maejima | 2003-09-09 |
| 6323560 | Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photo mask and method of exposure thereof | Koichiro Narimatsu, Nobuyuki Yoshioka, Shinya Soeda, Atsushi Hachisuka, Koji Taniguchi +3 more | 2001-11-27 |
| 6068952 | Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photomask and method of exposure thereof | Koichiro Narimatsu, Nobuyuki Yoshioka, Shinya Soeda, Atsushi Hachisuka, Koji Taniguchi +3 more | 2000-05-30 |
| 5892291 | Registration accuracy measurement mark | Koichiro Narimatsu, Nobuyuki Yoshioka, Shinya Soeda, Atsushi Hachisuka, Koji Taniguchi +3 more | 1999-04-06 |
| 5830607 | Phase shift mask and manufacturing method thereof and exposure method using phase shift mask | Akihiko Isao, Ryoichi Kobayashi, Nobuyuki Yoshioka, Yaichiro Watakabe, Junji Miyazaki +1 more | 1998-11-03 |
| 5674647 | Phase shift mask and manufacturing method thereof and exposure method using phase shift mask | Akihiko Isao, Ryoichi Kobayashi, Nobuyuki Yoshioka, Yaichiro Watakabe, Junji Miyazaki +1 more | 1997-10-07 |