Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9147913 | Diagnosis system and diagnosis method for lithium ion secondary battery | Seiji Ishikawa, Chizu Matsumoto | 2015-09-29 |
| 8676553 | Apparatus abnormality diagnosis method and system | Kenji Tamaki | 2014-03-18 |
| 8566070 | Apparatus abnormality monitoring method and system | Kenji Tamaki | 2013-10-22 |
| 8515719 | Apparatus anomaly monitoring method and system | Kenji Tamaki | 2013-08-20 |
| 8043772 | Manufacturing method and manufacturing system of semiconductor device | Junko Konishi, Toshihide Kawachi, Shigenori Yamashita, Takeshi Tashiro, Hidekimi Fudo | 2011-10-25 |
| 7289859 | Method for determining parameter of product design and its supporting system | Kenji Tamaki | 2007-10-30 |
| 7036084 | Industrial equipment and system | Akio Arakawa, Masanobu Sakai, Makoto Yoshino, Toru Ito | 2006-04-25 |
| 6801827 | Overlay inspection apparatus for semiconductor substrate and method thereof | Yasuhiro Yoshitake, Shunichi Matsumoto | 2004-10-05 |
| 6721940 | Exposure processing method and exposure system for the same | Yasuhiro Yoshitake, Tetsuya Yamazaki | 2004-04-13 |
| 6697698 | Overlay inspection apparatus for semiconductor substrate and method thereof | Yasuhiro Yoshitake, Shunichi Matsumoto | 2004-02-24 |
| 6653032 | Exposure method | Yasuhiro Yoshitake, Tetsuya Yamazaki | 2003-11-25 |