Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760017 | Wafer lithography equipment | Kazufumi Shiozawa, Masamichi Kishimoto, Nobuhiro Komine, Yoshimitsu Kato | 2017-09-12 |
| 8043772 | Manufacturing method and manufacturing system of semiconductor device | Toshiharu Miwa, Junko Konishi, Shigenori Yamashita, Takeshi Tashiro, Hidekimi Fudo | 2011-10-25 |
| 7879516 | Manufacturing method of semiconductor integrated circuit device | Hidekimi Fudo | 2011-02-01 |
| 6617080 | Photomask, semiconductor device, and method for exposing through photomask | Takuya Matsushita, Shigenori Yamashita, Yuki Miyamoto, Atsushi Ueno, Shinroku Maejima | 2003-09-09 |
| 5868560 | Reticle, pattern transferred thereby, and correction method | Naohisa Tamada, Yuki Miyamoto | 1999-02-09 |