Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018004 | Method of manufacturing semiconductor device | Takahiro Ueno, Motoshi Kitagawa | 2021-05-25 |
| 9711936 | Semiconductor laser and method for manufacturing the same | Masafumi Minami, Takahiro Ueno, Motoshi Kitagawa | 2017-07-18 |
| 6890692 | Method of focus monitoring and manufacturing method for an electronic device | Shuji Nakao, Yuki Miyamoto, Shinroku Maejima | 2005-05-10 |
| 6869735 | Method of pattern layout of a photomask for pattern transfer | — | 2005-03-22 |
| 6797443 | Focus monitoring method, focus monitoring apparatus, and method of manufacturing semiconductor device | Shuji Nakao, Yuki Miyamoto | 2004-09-28 |
| 6764794 | Photomask for focus monitoring | Shuji Nakao, Yuki Miyamoto, Shinroku Maejima | 2004-07-20 |
| 6503665 | Phase shift mask and semiconductor device fabricated with the phase shift mask | — | 2003-01-07 |
| 6395456 | Semiconductor device achieving higher integration, method of manufacturing thereof, and method of forming resist pattern used therefor | Yoshiaki Yamada | 2002-05-28 |
| 5868560 | Reticle, pattern transferred thereby, and correction method | Toshihide Kawachi, Yuki Miyamoto | 1999-02-09 |