Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7875409 | Method of manufacturing semiconductor device, mask and semiconductor device | Seiichiro Shirai, Takahiro Machida | 2011-01-25 |
| 6890692 | Method of focus monitoring and manufacturing method for an electronic device | Shuji Nakao, Yuki Miyamoto, Naohisa Tamada | 2005-05-10 |
| 6828163 | Wafer shape evaluating method and device producing method, wafer and wafer selecting method | Makoto Kobayashi, Kazuhito Matsukawa, Hidekazu Yamamoto | 2004-12-07 |
| 6811939 | Focus monitoring method, focus monitoring system, and device fabricating method | Shuji Nakao, Yuki Miyamoto | 2004-11-02 |
| 6764794 | Photomask for focus monitoring | Shuji Nakao, Yuki Miyamoto, Naohisa Tamada | 2004-07-20 |
| 6617080 | Photomask, semiconductor device, and method for exposing through photomask | Toshihide Kawachi, Takuya Matsushita, Shigenori Yamashita, Yuki Miyamoto, Atsushi Ueno | 2003-09-09 |
| 6479904 | Semiconductor device with registration accuracy measurement mark | — | 2002-11-12 |
| 6153941 | Semiconductor registration measurement mark | — | 2000-11-28 |