Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760017 | Wafer lithography equipment | Kazufumi Shiozawa, Toshihide Kawachi, Nobuhiro Komine, Yoshimitsu Kato | 2017-09-12 |
| 8953163 | Exposure apparatus, exposure method, and method of manufacturing semiconductor device | Kentaro Kasa, Manabu Takakuwa, Yosuke Okamoto | 2015-02-10 |