Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960481 | Evaluation method | — | 2005-11-01 |
| 6938238 | Method of manufacturing electronic device | Takashi Okagawa, Tetsuya Yamada, Atsushi Ueno, Kouichirou Tsujita | 2005-08-30 |
| 6849486 | Method of manufacturing a thinned gate electrode utilizing protective films and etching | Tetsuya Yamada, Atsushi Ueno, Kouichirou Tsujita, Takashi Okagawa | 2005-02-01 |
| 6774043 | Method of manufacturing semiconductor device | Kouichirou Tsujita | 2004-08-10 |
| 6607992 | Antireflection coating and semiconductor device manufacturing method | Kouichirou Tsujita, Junjiro Sakai, Kouji Oda, Koichiro Narimatsu | 2003-08-19 |
| 6518196 | Method of manufacturing semiconductor device | Tetsuya Yamada, Kouichirou Tsujita | 2003-02-11 |
| 6337175 | Method for forming resist pattern | — | 2002-01-08 |
| 6136479 | Method of forming photomask and pattern and method of forming a semiconductor device | — | 2000-10-24 |
| 5981149 | Method for manufacturing semiconductor device | — | 1999-11-09 |
| 5902718 | Methods and developer for developing a positive photoresist | — | 1999-05-11 |