| 12293925 |
Semiconductor device and method of manufacturing the same |
Yuki Murayama, Makoto KOSHIMIZU, Takahiro Mori, Satoshi Iida |
2025-05-06 |
| 11798886 |
Semiconductor device and method of manufacturing the same |
Hirokazu Sayama, Fumihiko Hayashi |
2023-10-24 |
| 11502036 |
Semiconductor device and method of manufacturing the same |
Hirokazu Sayama, Fumihiko Hayashi |
2022-11-15 |
| 8129078 |
Mask, method for manufacturing the same, and method for manufacturing semiconductor device |
Akira Imai |
2012-03-06 |
| 8119308 |
Photomask, apparatus for manufacturing semiconductor device having the photomask, and method of manufacturing semiconductor device using the photomask |
Ayumi Minamide, Akemi Moniwa, Manabu Ishibashi |
2012-02-21 |
| 7030007 |
Via-filling material and process for fabricating semiconductor integrated circuit using the material |
Teruhiko Kumada, Toshiyuki Toyoshima, Hideharu Nobutoki, Takeo Ishibashi, Yoshiharu Ono |
2006-04-18 |
| 6898851 |
Electronic device manufacturing method |
Yasutaka Nishioka, Shingo Tomohisa, Susumu Matsumoto, Fumio Iwamoto, Michinari Yamanaka |
2005-05-31 |
| 6607992 |
Antireflection coating and semiconductor device manufacturing method |
Kouichirou Tsujita, Atsumi Yamaguchi, Kouji Oda, Koichiro Narimatsu |
2003-08-19 |
| 5955227 |
Pattern determination method |
Kouichirou Tsujita, Akihiro Nakae |
1999-09-21 |
