Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12352674 | Test method and method for manufacturing semiconductor device | Hidetoshi Ishibashi, Seiji Oka, Yurie Furuta, Shunji Masumori | 2025-07-08 |
| 8835083 | Manufacturing method of photomask, method for optical proximity correction, and manufacturing method of semiconductor device | Akemi Moniwa, Akira Imai | 2014-09-16 |
| 8563200 | Manufacturing method of photomask, method for optical proximity correction, and manufacturing method of semiconductor device | Akemi Moniwa, Akira Imai | 2013-10-22 |
| 8426087 | Photomask, manufacturing apparatus and method of semiconductor device using the same, and photomask feature layout method | Mitsuru Okuno, Akemi Moniwa, Manabu Ishibashi | 2013-04-23 |
| 8119308 | Photomask, apparatus for manufacturing semiconductor device having the photomask, and method of manufacturing semiconductor device using the photomask | Akemi Moniwa, Junjiro Sakai, Manabu Ishibashi | 2012-02-21 |
| 6579657 | Material for forming a fine pattern and method for manufacturing a semiconductor device using the same | Takeo Ishibashi, Toshiyuki Toyoshima, Keiichi Katayama | 2003-06-17 |
| 6323560 | Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photo mask and method of exposure thereof | Koichiro Narimatsu, Shigenori Yamashita, Nobuyuki Yoshioka, Shinya Soeda, Atsushi Hachisuka +3 more | 2001-11-27 |
| 6171761 | Resist pattern forming method utilizing multiple baking and partial development steps | Takeo Ishibashi | 2001-01-09 |
| 6068952 | Registration accuracy measurement mark, method of repairing defect of the mark, photomask having the mark, method of manufacturing the photomask and method of exposure thereof | Koichiro Narimatsu, Shigenori Yamashita, Nobuyuki Yoshioka, Shinya Soeda, Atsushi Hachisuka +3 more | 2000-05-30 |
| 5892291 | Registration accuracy measurement mark | Koichiro Narimatsu, Shigenori Yamashita, Nobuyuki Yoshioka, Shinya Soeda, Atsushi Hachisuka +3 more | 1999-04-06 |
| 5858620 | Semiconductor device and method for manufacturing the same | Takeo Ishibashi, Toshiyuki Toyoshima, Keiichi Katayama | 1999-01-12 |