Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293911 | Structure including SiOCN layer and method of forming same | YoungChol Byun, Shankar Swaminathan, Eric James Shero | 2025-05-06 |
| 11901175 | Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer | Eric James Shero, Paul F. Ma, Shankar Swaminathan | 2024-02-13 |
| 11848200 | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures | Jacob Woodruff | 2023-12-19 |
| 11742198 | Structure including SiOCN layer and method of forming same | YoungChol Byun, Shankar Swaminathan, Eric James Shero | 2023-08-29 |
| 11424119 | Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer | Eric James Shero, Paul F. Ma, Shankar Swaminathan | 2022-08-23 |
| 11114294 | Structure including SiOC layer and method of forming same | Shankar Swaminathan, YoungChol Byun, Eric James Shero | 2021-09-07 |
| 10892156 | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures | Jacob Woodruff, Eric James Shero | 2021-01-12 |
| 10770286 | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures | Jacob Woodruff | 2020-09-08 |
| 9981286 | Selective formation of metal silicides | Jacob Woodruff, Michael Eugene Givens, Petri Raisanen | 2018-05-29 |