Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12378667 | Methods and systems for forming doped silicon nitride films | Xingye Wang, Fu Tang, Eric Jen Cheng Liu, Peijun Chen | 2025-08-05 |
| 12293911 | Structure including SiOCN layer and method of forming same | Bed Prasad Sharma, Shankar Swaminathan, Eric James Shero | 2025-05-06 |
| 11742198 | Structure including SiOCN layer and method of forming same | Bed Prasad Sharma, Shankar Swaminathan, Eric James Shero | 2023-08-29 |
| 11114294 | Structure including SiOC layer and method of forming same | Bed Prasad Sharma, Shankar Swaminathan, Eric James Shero | 2021-09-07 |