Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12378667 | Methods and systems for forming doped silicon nitride films | Xingye Wang, Fu Tang, Peijun Chen, YoungChol Byun | 2025-08-05 |
| 12295163 | Formation of gate stacks comprising a threshold voltage tuning layer | Fu Tang, Eric James Shero, Gejian Zhao | 2025-05-06 |
| 11814727 | Systems and methods for atomic layer deposition | — | 2023-11-14 |
| 10927459 | Systems and methods for atomic layer deposition | — | 2021-02-23 |
| 9790595 | Method and system to reduce outgassing in a reaction chamber | Sung Hoon Jung, Petri Raisanen, Mike Schmotzer | 2017-10-17 |
| 8993054 | Method and system to reduce outgassing in a reaction chamber | Sung Hoon Jung, Petri Raisanen, Mike Schmotzer | 2015-03-31 |