Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5902702 | Phase shift mask, blank for phase shift mask, and method of manufacturing phase shift mask | Shuji Nakao, Tatsunori Kaneoka | 1999-05-11 |
| 5872054 | Anti-reflection film and method of manufacturing | — | 1999-02-16 |
| 5783365 | Manufacturing method of semiconductor device | — | 1998-07-21 |
| 5547813 | Method of forming a fine resist pattern of high resolution using a contrast enhancement layer | — | 1996-08-20 |
| 5488246 | Semiconductor device and method of manufacturing the same | Yoshio Hayashide | 1996-01-30 |
| 4981529 | Semiconductor substrate provided with marks for alignment even under a resist film | — | 1991-01-01 |