Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6048647 | Phase shift mask of attenuation type and manufacturing method thereof | Junji Miyazaki, Akihiro Nakae, Nobuyuki Yoshioka | 2000-04-11 |
| 5296917 | Method of monitoring accuracy with which patterns are written | Haruhiko Kusonose | 1994-03-22 |