Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6271852 | boundary processing of oblique overlapping graphics to achieve dimensionally accurate electron beam irradiation | Koichi Moriizumi, Hironobu Taoka | 2001-08-07 |
| 6088520 | Method of producing highly precise charged beam drawing data divided into plurality of drawing fields | Hironobu Taoka, Koichi Moriizumi | 2000-07-11 |
| 5812412 | Charged beam pattern data generating method and a charged beam pattern data generating apparatus | Koichi Moriizumi, Makoto Kanno, Hironobu Taoka, Hiroomi Nakao, Kazuhiro Yamazaki | 1998-09-22 |
| 5796408 | Charged particle beam drawing data production apparatus and charged particle beam drawing system | Koichi Moriizumi, Makoto Kanno, Hironobu Taoka | 1998-08-18 |
| 5322764 | Method for forming a patterned resist | Takeshi Fijino | 1994-06-21 |