Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7006548 | Excimer laser device and gas for excimer laser | Akira Sumitani, Eiji Sunaka | 2006-02-28 |
| 6819699 | Arf excimer laser device, scanning type exposure device and ultraviolet laser device | Tatsuo Enami, Osamu Wakabayashi, Kiwamu Takehisa, Tsukasa HORI, Hakaru Mizoguchi | 2004-11-16 |
| 6496527 | Ultraviolet laser apparatus and gas for ultraviolet laser | Osamu Wakabayashi, Akira Sumitani | 2002-12-17 |