Issued Patents All Time
Showing 1–25 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940736 | Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Gota Niimi, Yoshifumi Ueno | 2024-03-26 |
| 11491534 | Continuous casting method, cast slab, and continuous casting apparatus | Toshiaki Mizoguchi, Kenji Kubo, Makoto Ishii | 2022-11-08 |
| 11272608 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Atsushi Ueda | 2022-03-08 |
| 11042102 | Extreme ultraviolet light generation device and electronic device manufacturing method | Takashi Saito | 2021-06-22 |
| 10820400 | Extreme ultraviolet light generation apparatus | Hiroaki TOMURO, Yoshiyuki Honda | 2020-10-27 |
| 10764986 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Hitoshi Nagano, Osamu Wakabayashi | 2020-09-01 |
| 10532386 | Continuous-cast slab, method and apparatus of manufacturing the same, and method and apparatus of manufacturing thick steel plate | Toshiaki Mizoguchi, Hiroaki Uchiyama, Hideaki Sakurai, Ryousuke Takata, Shuntaro Imai +1 more | 2020-01-14 |
| 10314152 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Hitoshi Nagano, Osamu Wakabayashi | 2019-06-04 |
| 10268119 | Extreme ultraviolet light generating device | Atsushi Ueda, Takashi Saito | 2019-04-23 |
| 10136510 | Extreme ultraviolet light generation device | Georg Soumagne, Toshihiro Nishisaka | 2018-11-20 |
| 10001706 | Extreme ultraviolet light generation apparatus and method of designing the same | Atsushi Ueda | 2018-06-19 |
| 9872372 | Extreme ultraviolet light generation device | Atsushi Ueda, Yoshifumi Ueno, Tamotsu Abe | 2018-01-16 |
| 9510433 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Hitoshi Nagano, Osamu Wakabayashi | 2016-11-29 |
| 9465307 | Cleaning method for EUV light generation apparatus | Hakaru Mizoguchi | 2016-10-11 |
| 8902948 | Polarization purity control device and gas laser apparatus provided with the same | Fumika Yoshida, Osamu Wakabayashi, Kouji Kakizaki | 2014-12-02 |
| 8901524 | Extreme ultraviolet light source apparatus | Takeshi Asayama, Kouji Kakizaki, Akira Endo | 2014-12-02 |
| 8901522 | Chamber apparatus and extreme ultraviolet light generation system | Yoshifumi Ueno, Osamu Wakabayashi | 2014-12-02 |
| 8891574 | Polarization purity control device and gas laser apparatus provided with the same | Fumika Yoshida, Osamu Wakabayashi, Kouji Kakizaki | 2014-11-18 |
| 8884257 | Chamber apparatus and extreme ultraviolet light generation system | Junichi Fujimoto, Kouji Ashikawa | 2014-11-11 |
| 8872142 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Hitoshi Nagano, Osamu Wakabayashi | 2014-10-28 |
| 8855167 | Gas discharge chamber | Fumika Yoshida, Osamu Wakabayashi, Kouji Kakizaki | 2014-10-07 |
| 8841641 | Extreme ultraviolet light source apparatus | Kouji Kakizaki, Tatsuya Yanagida | 2014-09-23 |
| 8748853 | Chamber apparatus | Osamu Wakabayashi, Yutaka Shiraishi, Junichi Fujimoto | 2014-06-10 |
| 8629417 | Extreme ultraviolet light generation apparatus | Tamotsu Abe, Takanobu Ishihara, Osamu Wakabayashi | 2014-01-14 |
| 8624208 | Extreme ultraviolet light generation system | Tamotsu Abe, Hitoshi Nagano, Osamu Wakabayashi | 2014-01-07 |