Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966721 | Laser system | Kouji Kakizaki, Masaki Arakawa, Yasuhiro KAMBA, Akiyoshi Suzuki, Osamu Wakabayashi | 2018-05-08 |
| 9198273 | Extreme ultraviolet light generation apparatus | Miwa Igarashi, Yukio Watanabe, Norio Iwai, Osamu Wakabayashi | 2015-11-24 |
| 8884257 | Chamber apparatus and extreme ultraviolet light generation system | Shinji Nagai, Junichi Fujimoto | 2014-11-11 |
| 8809821 | Holder device, chamber apparatus, and extreme ultraviolet light generation system | Junichi Fujimoto, Hidenobu Kameda, Osamu Wakabayashi | 2014-08-19 |