Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9198273 | Extreme ultraviolet light generation apparatus | Miwa Igarashi, Yukio Watanabe, Kouji Ashikawa, Osamu Wakabayashi | 2015-11-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9198273 | Extreme ultraviolet light generation apparatus | Miwa Igarashi, Yukio Watanabe, Kouji Ashikawa, Osamu Wakabayashi | 2015-11-24 |