Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978997 | Laser apparatus and electronic device manufacturing method | Hirotaka Miyamoto, Takuma YAMANAKA | 2024-05-07 |
| 11411364 | Line narrowing module, gas laser apparatus, and electronic device manufacturing method | Shinichi Matsumoto | 2022-08-09 |
| 10916910 | Line narrowing module | Shinichi Matsumoto | 2021-02-09 |
| 9894743 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Masato Moriya, Hiroaki Nakarai | 2018-02-13 |
| 9882334 | Mirror device | Toru Suzuki, Yukio Watanabe, Osamu Wakabayashi | 2018-01-30 |
| 9301379 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Masato Moriya, Hiroaki Nakarai | 2016-03-29 |
| 9198273 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Kouji Ashikawa, Norio Iwai, Osamu Wakabayashi | 2015-11-24 |
| 9179534 | Extreme ultraviolet light source apparatus | Yukio Watanabe, Osamu Wakabayashi | 2015-11-03 |
| 8669542 | Extreme ultraviolet light source apparatus | Yukio Watanabe, Osamu Wakabayashi | 2014-03-11 |
| 6605414 | Method for manufacturing magnetoresistance head | Keiji Watanabe, Koji Nozaki, Yoko Kuramitsu, Ei Yano, Takahisa Namiki +4 more | 2003-08-12 |
| 6582878 | Chemical amplification resist compositions and process for the formation of resist patterns | Takahisa Namiki, Ei Yano, Keiji Watanabe, Koji Nozaki, Yoko Kuramitsu | 2003-06-24 |
| 6329125 | Chemically amplified resist compositions and process for the formation of resist patterns | Satoshi Takechi, Akiko Kotachi, Koji Nozaki, Ei Yano, Keiji Watanabe +3 more | 2001-12-11 |
| 6200724 | Chemical amplification resist compositions and process for the formation of resist patterns | Takahisa Namiki, Ei Yano, Keiji Watanabe, Koji Nozaki, Yoko Kuramitsu | 2001-03-13 |
| 6200725 | Chemically amplified resist compositions and process for the formation of resist patterns | Satoshi Takechi, Akiko Kotachi, Koji Nozaki, Ei Yano, Keiji Watanabe +3 more | 2001-03-13 |
| 6052261 | Method for manufacturing magnetoresistance head | Keiji Watanabe, Koji Nozaki, Yoko Kuramitsu, Ei Yano, Takahisa Namiki +4 more | 2000-04-18 |
| 6013416 | Chemically amplified resist compositions and process for the formation of resist patterns | Koji Nozaki, Ei Yano, Keiji Watanabe, Takahisa Namiki, Yoko Kuramitsu +3 more | 2000-01-11 |
| 5968713 | Chemically amplified resist compositions and process for the formation of resist patterns | Koji Nozaki, Ei Yano, Keiji Watanabe, Takahisa Namiki, Yoko Kuramitsu +3 more | 1999-10-19 |
| 5962191 | Resist compositions for forming resist patterns | Koji Nozaki, Ei Yano, Keiji Watanabe, Takahisa Namiki, Yoko Kuramitsu | 1999-10-05 |
| 5910392 | Resist composition, a process for forming a resist pattern and a process for manufacturing a semiconductor device | Koji Nozaki, Ei Yano, Keiji Watanabe, Takahisa Namiki | 1999-06-08 |
| 5906912 | Processes for forming resist pattern and for producing semiconductor device | Keiji Watanabe, Ei Yano, Keiko Yano, Takashi Maruyama, Eiichi Hoshino +2 more | 1999-05-25 |
| 5824452 | Resist compositions and process for the formation of resist patterns | Koji Nozaki, Ei Yano, Keiji Watanabe, Takahisa Namiki, Yoko Kuramitsu | 1998-10-20 |
| 5804354 | Composition for forming conductivity imparting agent and pattern forming method | Keiji Watanabe, Yasuhiro Yoneda, Takashi Maruyama, Keiko Yano, Tomio Nakamura +5 more | 1998-09-08 |