Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11778721 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yuichi Nishimura, Takayuki Yabu | 2023-10-03 |
| 9894743 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Miwa Igarashi, Masato Moriya | 2018-02-13 |
| 9373926 | Laser chamber and discharge excitation gas laser apparatus | Hiroaki TSUSHIMA, Hakaru Mizoguchi, Junichi Fujimoto, Natsushi Suzuki | 2016-06-21 |
| 9301379 | Extreme ultraviolet light generation apparatus | Yukio Watanabe, Miwa Igarashi, Masato Moriya | 2016-03-29 |
| 8885680 | Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam | Osamu Wakabayashi, Hideo Hoshino | 2014-11-11 |