Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12109648 | Laser annealing apparatus and method for manufacturing electronic device | Satoshi Tanaka, Akiyoshi Suzuki | 2024-10-08 |
| 10143074 | Filter and target supply apparatus | Tomohide Ichinose, Fumio Iwamoto, Yutaka Shiraishi, Tsukasa HORI | 2018-11-27 |
| 10141186 | Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system | Hirokazu HOSODA, Takayuki Yabu | 2018-11-27 |
| 10122145 | Laser apparatus and extreme ultraviolet light generation system | Yoshiaki Kurosawa | 2018-11-06 |
| 9837779 | Laser apparatus and laser apparatus manufacturing method | Yasufumi Kawasuji | 2017-12-05 |
| 9685756 | Laser amplifier, laser apparatus, and extreme ultraviolet light generating system | Takashi Suganuma | 2017-06-20 |
| 9362703 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Hakaru Mizoguchi, Takashi Suganuma, Osamu Wakabayashi | 2016-06-07 |
| 9318864 | Laser beam output control with optical shutter | Krzysztof Nowak, Osamu Wakabayashi | 2016-04-19 |
| 8934510 | Wavelength converter, wavelength converting device, solid state laser device, and laser system | Kouji Kakizaki, Takashi Onose | 2015-01-13 |
| 8891161 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Hakaru Mizoguchi, Takashi Suganuma, Osamu Wakabayashi | 2014-11-18 |
| 8885680 | Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam | Hiroaki Nakarai, Osamu Wakabayashi | 2014-11-11 |
| 8817838 | Laser device with optical element module on separate plate | Tamotsu Abe | 2014-08-26 |
| 8811438 | Temperature controller for gas laser | Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki | 2014-08-19 |
| 8804902 | Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus | Hiroshi Someya, Tamotsu Abe, Takashi Suganuma, Akira Sumitani | 2014-08-12 |
| 8787413 | Temperature controller for gas laser | Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki | 2014-07-22 |
| 8742380 | Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target | Tsukasa HORI, Tatsuya Yanagida | 2014-06-03 |
| 8710472 | Target output device and extreme ultraviolet light source apparatus | Takanobu Ishihara, Youichi Sasaki, Kouji Kakizaki, Masahiro Inoue, Takayuki Yabu | 2014-04-29 |
| 8698114 | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device | Masato Moriya, Hakaru Mizoguchi, Osamu Wakabayashi | 2014-04-15 |
| 8698111 | Extreme ultraviolet light generation system | Toshihiro Nishisaka, Yukio Watanabe, Osamu Wakabayashi | 2014-04-15 |
| 8558202 | Extreme ultraviolet light source apparatus | Tatsuya Yanagida, Akira Endo, Hiroshi Komori, Shinji Nagai, Kouji Kakizaki +1 more | 2013-10-15 |
| 8536550 | Method and apparatus for cleaning collector mirror in EUV light generator | Takeshi Asayama, Hiroshi Someya, Masato Moriya, Tamotsu Abe | 2013-09-17 |
| 8507883 | Extreme ultraviolet light source apparatus | Akira Endo, Kouji Kakizaki, Tamotsu Abe, Akira Sumitani, Takanobu Ishihara +3 more | 2013-08-13 |
| 8498317 | Temperature controller for gas laser | Yukio Watanabe, Hideyuki Hayashi, Kouji Kakizaki, Michio Shinozaki | 2013-07-30 |
| 8492738 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Yoshifumi Ueno, Osamu Wakabayashi, Tamotsu Abe, Akira Sumitani, Akira Endo +1 more | 2013-07-23 |
| 8476609 | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device | Akira Endo, Krzysztof Nowak, Tatsuya Ariga, Masato Moriya, Osamu Wakabayashi | 2013-07-02 |